Lee, Woo-Sun : rechercher sur Z-Library

Le plus grand référentiel d'articles scientifiques au monde. 70,000,000+ d'articles gratuitement.

Don't use scam websites

Livres
Articles (74)
Les plus populaires
Liste
- Liste
- Tableau

1

An optimization of tungsten plug chemical mechanical polishing (CMP) using different consumables

Woo-Sun Lee, Sang-Yong Kim, Yong-Jin Seo, Jong-KooK Lee

Journal:

Journal of Materials Science: Materials in Electronics

Année:

2001

Langue:

english

Fichier:

PDF, 149 KB

english, 2001

2

Effects of slurry filter size on the chemical mechanical polishing (CMP) defect density

Yong-Jin Seo, Sang-Yong Kim, Yeon-Ok Choi, Yong-Taek Oh, Woo-Sun Lee

Journal:

Materials Letters

Année:

2004

Langue:

english

Fichier:

PDF, 626 KB

english, 2004

3

Effects of STI-fill thickness on the CMP process defects

Yong-Jin Seo, Gi-Uk Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 406 KB

english, 2004

4

Optimization of pre-metal Dielectric (PMD) materials

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Journal of Materials Science: Materials in Electronics

Année:

2001

Langue:

english

Fichier:

PDF, 666 KB

english, 2001

5

Electromigration characteristics in dual-damascene copper interconnects by difference of via structures

Nam-Hoon Kim, Sang-Yong Kim, Woo-Sun Lee, Eui-Goo Chang

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 1.76 MB

english, 2007

6

Prevention of plasma-induced damage during HDP–CVD deposition

Sang-Yong Kim, Woo-Sun Lee, Yong-Jin Seo

Journal:

Journal of Materials Processing Technology

Année:

2004

Langue:

english

Fichier:

PDF, 842 KB

english, 2004

7

Experimental investigation on the relationship between sluice caisson shape of tidal power plant and the water discharge capability

Dal Soo Lee, Sang-Ho Oh, Jin-Hak Yi, Woo-Sun Park, Hyu-Sang Cho, Duk-Gu Kim, Hyun-Min Eom, Suk-Jin Ahn

Journal:

Renewable Energy

Année:

2010

Langue:

english

Fichier:

PDF, 1.18 MB

english, 2010

8

Structural and surface properties of NiCr thin films prepared by DC magnetron sputtering under variation of annealing conditions

Yong Kwon, Nam-Hoon Kim, Gwang-Pyo Choi, Woo-Sun Lee, Yong-Jin Seo, Jinseong Park

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 581 KB

english, 2005

9

Optimization of post-CMP cleaning process for elimination of CMP slurry-induced metallic contaminations

Yong-Jin Seo, Woo-Sun Lee, Sang-Yong Kim, Jin-Sung Park, Eui-Goo Chang

Journal:

Journal of Materials Science: Materials in Electronics

Année:

2001

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2001

10

Non-selenization method using sputtering deposition with a CuSe2target for CIGS thin film

Nam-Hoon Kim, Seongha Oh, Woo-Sun Lee

Journal:

Journal of the Korean Physical Society

Année:

2012

Langue:

english

Fichier:

PDF, 170 KB

english, 2012

11

Improvement of the surface roughness and sensing properties of cerium dioxide thin film by chemical mechanical polishing

Kim, Nam-Hoon, Ko, Pil-Ju, Lee, Woo-Sun

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2008

Langue:

english

Fichier:

PDF, 642 KB

english, 2008

12

Wave Force Characteristics and Stability of Detached Breakwaters Consisting of Open Cell Caissons Interlocked via Crushed Stones

Lee, Byeong Wook, Jung, Jae-Sang, Park, Woo-Sun, Yoon, Jae-Seon

Journal:

Année:

2020

Fichier:

PDF, 7.59 MB

2020

13

ChemInform Abstract: Synthesis of New Chiral Ligands Based on Thiophene Derivatives for Use in Catalytic Asymmetric Oxidation of Sulfides.

Yong-Chul Jeong, Dae-Jun Ahn, Woo-Sun Lee, Seung-Han Lee, Kwang-Hyun Ahn

Journal:

Année:

2011

Fichier:

PDF, 27 KB

2011

14

Temperature-dependent ID-VD characteristics and analytical model for a-Si:H thin film transistors

Woo-Sun Lee, Gerold W. Neudeck, Min-Koo Han

Journal:

Solid-State Electronics

Année:

1994

Langue:

english

Fichier:

PDF, 229 KB

english, 1994

15

Chemical mechanical polishing of Ba0.6Sr0.4TiO3 film prepared by sol–gel method

Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 327 KB

english, 2004

16

Improvements of oxide-chemical mechanical polishing performances and aging effect of alumina and silica mixed abrasive slurries

Yong-Jin Seo, Woo-Sun Lee, Pochi Yeh

Journal:

Microelectronic Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 439 KB

english, 2004

17

Effects of oxidant additives for exact selectivity control of W- and Ti-CMP process

Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 2.69 MB

english, 2005

18

Optimization of nitride films for linear pre-metal dielectric process

Nam-Hoon Kim, Yong-Jin Seo, Sung-Woo Park, Do-Won Lee, Sang-Yong Kim, Eui-Goo Chang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 239 KB

english, 2005

19

Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions

Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 649 KB

english, 2006

20

Improvement of TEOS-chemical mechanical polishing performance by control of slurry temperature

Nam-Hoon Kim, Pil-Ju Ko, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 360 KB

english, 2006

21

CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters

Gwon-Woo Choi, Kang-Yeon Lee, Nam-Hoon Kim, Jin-Seong Park, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 226 KB

english, 2006

22

Erratum to: “Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions” [Microelect. Eng. 83 (2006) 362–370]

Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 251 KB

english, 2007

23

Platinum chemical mechanical polishing (CMP) characteristics for high density ferroelectric memory applications

Nam-Hoon Kim, Pil-Ju Ko, Seock Koo Kang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 904 KB

english, 2007

24

Creation mechanism of metal depression in sputtering process for aluminum interconnects

Sang-Yong Kim, Kang-Yeon Lee, Dong-You Choi, Nam-Hoon Kim, Woo-Sun Lee, Eui-Goo Chang

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 1.08 MB

english, 2007

25

A study on the improved performances of OLED using CMP process parameters determined by DOE method

Yong-Jin Seo, Gwon-Woo Choi, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 1.25 MB

english, 2008

26

Surface planarization of ZnO thin film for optoelectronic applications

Woo-Sun Lee, Gwon-Woo Choi, Yong-Jin Seo

Journal:

Microelectronics Journal

Année:

2009

Langue:

english

Fichier:

PDF, 543 KB

english, 2009

27

Chemical mechanical polishing performances by filtering and retreatment of used silica abrasives slurry

Yong-Jin Seo, Sung-Woo Park, Nam-Hoon Kim, Eui-Goo Chang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 474 KB

english, 2005

28

Electrochemical corrosion effects and chemical mechanical polishing characteristics of tungsten film using mixed oxidizers

Yong-Jin Seo, Nam-Hoon Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 349 KB

english, 2006

29

Evaluation of electrical and optical properties of indium tin oxide thin film using chemical mechanical polishing technique

Yong-Jin Seo, Gwon-Woo Choi, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 920 KB

english, 2007

30

A study on the chemical mechanical polishing of oxide film using a zirconia (ZrO2)-mixed abrasive slurry (MAS)

Sung-Woo Park, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2008

Langue:

english

Fichier:

PDF, 1.77 MB

english, 2008

31

Effects of different oxidizers on the W-CMP performance

Yong-Jin Seo, Woo-Sun Lee

Journal:

Materials Science and Engineering: B

Année:

2005

Langue:

english

Fichier:

PDF, 262 KB

english, 2005

32

Application of tungsten slurry for copper-chemical mechanical polishing

Yong-Jin Seo, Woo-Sun Lee

Journal:

Materials Science and Engineering: B

Année:

2005

Langue:

english

Fichier:

PDF, 334 KB

english, 2005

33

Influences of thickness-uniformity and surface morphology on the electrical and optical properties of sputtered CdTe thin films for large-area II–VI semiconductor heterostructured solar cells

Youn-Ok Choi, Nam-Hoon Kim, Ju-Sun Park, Woo-Sun Lee

Journal:

Materials Science and Engineering: B

Année:

2010

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2010

34

Chemical mechanical polishing (CMP) mechanisms of thermal SiO2 film after high-temperature pad conditioning

Nam-Hoon Kim, Pil-Ju Ko, Gwon-Woo Choi, Yong-Jin Seo, Woo-Sun Lee

Journal:

Thin Solid Films

Année:

2006

Langue:

english

Fichier:

PDF, 624 KB

english, 2006

35

Chemical mechanical polishing of BTO thin film for vertical sidewall patterning of high-density memory capacitor

Nam-Hoon Kim, Pil-Ju Ko, Yong-Jin Seo, Woo-Sun Lee

Journal:

Thin Solid Films

Année:

2006

Langue:

english

Fichier:

PDF, 289 KB

english, 2006

36

Chemical mechanical polishing characteristics in (Bi,La)Ti3O12 damascene process for high-density ferroelectric memories

Nam-Hoon Kim, Sang-Hun Shin, Pil-Ju Ko, Woo-Sun Lee

Journal:

Thin Solid Films

Année:

2007

Langue:

english

Fichier:

PDF, 547 KB

english, 2007

37

Reduction of process defects using a modified set-up for chemical mechanical polishing equipment

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2003

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2003

38

Advantages of point of use (POU) slurry filter and high spray method for reduction of CMP process defects

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2003

Langue:

english

Fichier:

PDF, 560 KB

english, 2003

39

CMP properties and fabrication of OLED using MEH-PPV

Woo-Sun Lee, Gwon-Woo Choi, Yong-Jin Seo

Journal:

physica status solidi (c)

Année:

2008

Langue:

english

Fichier:

PDF, 268 KB

english, 2008

40

Optical properties of GaSe:Er3+single crystals

Woo-Sun Lee, Nam-Oh Kim, Byeung-In Kim

Journal:

Journal of Materials Science Letters

Année:

1996

Langue:

english

Fichier:

PDF, 184 KB

english, 1996

41

Nested balancedN-ary designs

Sudhir Gupta, Woo-Sun Lee, Sanpei Kageyama

Journal:

Année:

1995

Langue:

english

Fichier:

PDF, 339 KB

english, 1995

42

Effects of conditioning temperature on polishing pad for oxide chemical mechanical polishing process

Nam-Hoon Kim, Gwon-Woo Choi, Jin-Seong Park, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 1.25 MB

english, 2005

43

Chemical mechanical polishing of PZT thin films for FRAM applications

Yong-Jin Seo, Jin-Seong Park, Woo-Sun Lee

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 447 KB

english, 2006

44

ZnO sol–gel derived porous film for CO gas sensing

Hyun-Wook Ryu, Bo-Seok Park, Sheikh A. Akbar, Woo-Sun Lee, Kwang-Jun Hong, Youn-Jin Seo, Dong-Charn Shin, Jin-Seong Park, Gwang-Pyo Choi

Journal:

Sensors and Actuators B: Chemical

Année:

2003

Langue:

english

Fichier:

PDF, 227 KB

english, 2003

45

Influence of dispersed-alumina particle size on the fracture toughness of 3 mol% yttria-stabilized zirconia polycrystals (3Y-TZP)

Jong-Kook Lee, Min-Jung Kim, Eun-Gu Lee, Woo-Sun Lee

Journal:

Journal of Materials Science Letters

Année:

2002

Langue:

english

Fichier:

PDF, 716 KB

english, 2002

46

Laser-induced doping of aluminum into a cadmium telluride thin film: Electrical and optical properties

Nam-Hoon Kim, Kuk Do Myung, Geum-Bae Cho, Woo-Sun Lee

Journal:

Journal of the Korean Physical Society

Année:

2012

Langue:

english

Fichier:

PDF, 227 KB

english, 2012

47

Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

Yong-Jin Seo, Nam-Hoon Kim, Woo-Sun Lee

Journal:

Materials Letters

Année:

2006

Langue:

english

Fichier:

PDF, 395 KB

english, 2006

48

Adenoid cystic carcinoma of the Bartholin's gland: Report of two cases and review of the literature

Sook-Young Vivian Yang, Jeong-Won Lee, Woo-Sun Kim, Kyoung-Lan Jung, Sun-Joo Lee, Je-Ho Lee, Duk-Soo Bae, Byoung-Gie Kim

Journal:

Gynecologic Oncology

Année:

2006

Langue:

english

Fichier:

PDF, 196 KB

english, 2006

49

Electrical and optical properties of sputter-deposited cadmium sulfide thin films optimized by annealing temperature

Nam-Hoon Kim, Seung-Han Ryu, Hyo-Sup Noh, Woo-Sun Lee

Journal:

Materials Science in Semiconductor Processing

Année:

2012

Langue:

english

Fichier:

PDF, 432 KB

english, 2012

50

Evaluation of vertical axis turbine characteristics for tidal current power plant based on in situ experiment

Han, Sang-Hun, Park, Jin-Soon, Lee, Kwang-Soo, Park, Woo-Sun, Yi, Jin-Hak

Journal:

Ocean Engineering

Année:

2013

Langue:

english

Fichier:

PDF, 1.62 MB

english, 2013